ENGINEERING IMPROVED PERFORMANCE AND RELIABILITY
Parker Veriflo division's F9 Series UHP Check valve offers improved performance and compatibility featuring a patented asymmetric spring design for a consistently quiet operation and a lower flow restriction compared to competition.
The F9 Series Check Valve offers high Cv (up to Cv = 0.90) in a small footprint to conserve much needed panel space. Two seal materials achieve compatibility with all semiconductor gases and wide rage of flow.
Assembled and packaged in a Class 100 clean room, the F9 is designed for use in Fab, VMB/VMP and Gas cabinets.
F9 Stainless steel check valve
- Noise free operation with the patented asymmetric spring design
- Welded design reduces fooprint
- Electropolished(EP) version for Ultra High Purity application
- Vericlean 316L stainless steel enhances corrosion resistance