FR1400 UHP Single Stage High Flow,
Pressure Reducing Regulator
ENGINEERING IMPROVED PERFORMANCE
AND RELIABILITY
The FR1400 is an ultrahigh purity, tied diaphragm, regulator for high pressure gas delivery in semiconductor and other clean processes, offers high flow capability (up to 800 slpm) with an inlet pressure up to 3000 psig.
FR 1400 is an excellent choice for cylinder or point of use bulk, Valve Manifold Boxes and specialty gas applications.
FR1400 Regulator
- 316 Stainless steel body & 10 μ in. Ra surface finish
- Manufactured for ultra high purity semiconductor gas applications
- Metal-to-Metal seal prevents the leakage
- Tied diaphragm design
- FR line compliments current premium QR4000& HF1200
- FR series are divided into FR1000, FR12000, FR1400 following the Inlet Pressure
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& Contact Parker
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