UHP PFA & PTFE Regulator, Valve & Fitting
ENGINEERING IMPROVED PERFORMANCE AND RELIABILITY

Parker PFA & PTFE Products are designed for use in UHP and corrosive chemical handling system, including semiconductor fab.

PFA & PTFE products provide a leak tight connection with minimal dead volume and are ideally suited for use in ultra-high purity (UHP) semiconductor manufacturing and/or corrosive chemical applications. 

Made of UHP PFA &PTFE resulting in minimal generation of surface particulates and total organic carbon(TOC) as well as reliable performance.

PTFE Check valve CV-1, CV-3
  • Tongue & Groove external seal
  • PTFE spring allows for extremely low cracking pressure operation
  • Eliminates o-rings and compatibility problems.

PFA Diaphragm valve
  • Stainless steel coated PFA spring enhances strong corrosive resistance
  • Compatible with wide range of process media
  • One piece modified PTFE diaphragm provide higher cycle life
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Parker UHP PFA & PTFE Product