INSTRUMENTATION PROCESS
FEATURED PRODUCTS
The FR1400 is an ultrahigh purity, tied diaphragm, regulator for high pressure gas delivery in semiconductor and other clean processes, offers high flow capability (up to 800 slpm) with an inlet pressure up to 3000 psig.
PFA & PTFE products provide a leak tight connection with minimal dead volume and are ideally suited for use in ultra-high purity (UHP) semiconductor manufacturing and/or corrosive chemical applications.
Parker Veriflo division's F9 Series UHP Check valve offers improved performance and compatibility featuring a patented asymmetric spring design for a consistently quiet operation and a lower flow restriction compared to competition.
TOOLS REGULATORS
SQ2Micro regulators are designed for UHP point-of-use applications requiring precision pressure control in a small form factor. The product’s advanced performance and specifications makes it ideal for use in critical semiconductor tool operations.
SMSQ2Micro Series pressure regulators are designed for UHP applications requiring precision pressure control in a small envelope. The product’s advanced performance and specifications makes it ideal for use in critical semiconductor tool operations.
TOOLS DIAPHRAGM VALVES
The 930Y Series combines two valves into a single body simplifying the integration of a purge line into a gas system. Ideal for (ultra-high purity) semiconductor applications needing flow capacities up to 0.30 Cv and operating pressures up to 300 psig.
The 930 Series provides excellent reliability, leak integrity, and cleanliness making it ideal for use in UHP semiconductor applications needing flow capacities up to 0.30 Cv and operating pressures up to 300 psig.
The SM930 Series surface mount valve provides excellent reliability, leak integrity, and cleanliness making it ideal for use in UHP semiconductor tool applications requiring flow capacities up to 0.30 Cv and operating pressures up to 300 psig
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Phone: +65 6887 6300
