파카하니핀 반도체 초고순도 피팅 밸브 솔루션

어렵고 까다로운 반도체 공정 설비를 생산할 때 무엇을 가장 우선으로 고려하시나요?
제품의 기능 및 안정성은 기본이며, 빠른 대응 또한 가능해야 합니다. 파카코리아는 제품의 국산화를 통해 고객의 필요에 누구보다도 빠르게 대응하고 있습니다.
파카코리아, Veriflo 제품 국산화 완료!
반도체 생산 공정은 웨이퍼 공정, 가공 공정, 테스티 및 조립 공정을 거치게 됩니다. 
이러한 공정을 들여다 보면, 수 백개 이상의 복잡한 공정으로 이루어 지기 때문에 반도체 제조 장비를 생산하는 것은 매우 까다로운 일입니다.

Parker Veriflo 의 SQ Series 레귤레이터는 가스 회사, 장비 제조업체 및 최종 사용자를 위한 프로세스 가스 캐비닛에 사용하도록 설계된 고 유량, 고성능 POS (Point-of-Use) 레귤레이터입니다.

SQ 시리즈 레귤레이터는 Tool Hook Up  공정에 적용하여 공정 가스 압력을 정밀하게 제어합니다. 그 결과, 질량 유량 제어기의 안정적인 유량과 압력이 유지됩니다.

파카코리아는 SQ140 레귤레이터를 비롯한 다양한 제품을 국산화하여 그 동안 해외 제조 제품을 사용하면서 불편을 겪었을 국내 장비 생산업체들에게 빠르게 대응하고 있습니다.  견적 기간 및 납기 단축으로 고객사로부터 큰 호응을 얻고 있습니다.
UHP Stainless Steel Diaphragm Valve Welded 
830 / 930 Valve
Parker Hannifin’s Veriflo Division presents the 830 valve for use in solar and semiconductor applications. The 830 has many of the 930 Series valve features but at a lower price point. 

• The maximum operating pressure for the manual valve is 300 psig.  In addition, the 830 offers a LP (125 psig) and a new MP (300 psig) air actuation versions.

[ Performance ]
* Design
  • Proof Pressure
  AOPLP : 188 psig (13 barg)
  AOPMP, L, I, M, S : 450 psig (31 barg)
  • Burst Pressure
   AOPLP : 375 psig (26 barg)
   AOPMP, L, I, M, S : 900 psig (62 barg)

* Flow Capacity
 • All AOP and Spin Handwheel
  : Cv 0.30
  • Lever (L), Mini Lever (M), Indicator Knob (I):  Cv 0.22
UHP Stainless Steel Quick Turn Handle Diaphragm Valve
830QT Series
• Parker Hannifin Corporation’s Veriflo Division presents the 830 quick turn handle valve for use in semiconductor and solar applications.

• The maximum operating pressure for the quick turn handle valve is 150 psig.

• Safety is highly focused with a simple push-pin to enable lock and release functionality, at the same time preventing accidental turning on and off by the locking device.
[ Parformance ]
* Design
  • Proof Pressure : 225 psig (15.5 barg)
  • Burst Pressure : 450 psig (31.0 barg)
  • Flow Capacity : Cv 0.30
UHP High Performance Point-Of-Use Regulator
SQ140E Regulator
SQ140E .5 Cv 초 고순도 감압 레귤레이터는 고유량 고압 가스 용도를 위해 특수 재료로 제작된 내부 나사 산이 없는 고정형 다이어프램을 제공합니다. SQ140E 는 프로세스 가스의 안정적인 압력과 다운스트림 시스 템의 안정적인 유량 성능을 제공합니다.

[ 성능 사양 ]
  • 최대 입구 압력 • 250 psig (17 barg)
  • 출구 압력 • 0 - 130 psig (9 barg)
  • 파열 압력 • 750 psig (52 barg)
  • 검증 압력 • 375 psig (26 barg)
  • 유량 용량 • Cv = 0.5
  • 내부 누출 • Under 4 x 10-8 scc/sec He
  • 외부 누출 • 2 x 10-10 scc/sec He (인보드)
  • 작동 온도 • -40°F ~ 150°F (-40°C ~ 66°C)
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UHP Stainless Steel Diaphragm Valve High Pressure, High Flow 
17R / 18R Series 
The 17R Series valve provides a high flow and positive shut off for high purity fluid systems.  
This 1/2” spring type diaphragm valve offers superior leak integrity for manually and pneumatically actuated versions with pressure ranges from vacuum to 3,000 psig.

[ Performance ]
* Flow Capacity
  - Manual Cv 0.8
  - Pneumatic Cv 0.75

* Leak Rate
  - Design Internal
< 4 X 10-9 scc/sec He Inboard Test Method

  - Design External
< 1 X 10-9 scc/sec He Inboard Test Method

* Production Leak Test
Outboard sniffer probe at 2000 - 2500 psig,  20-25% Helium 
Check Valve - CV1
Check Valve, Bonded - CV-3
CV-1 and CV-3 valves
Bulk chemical systems are trending larger diameter piping/ tubing systems. Parker provides the largest fluoropolymer check valve in the industry today.

The check valve is metal free and made from all virgin high purity fluoropolymers making it ideal for nearly all chemicals. The unique design provides extremely low cracking pressure, high flows and high integrity sealing for back flow protection.
[ Features ]
• Low cracking pressure
• Low back check sealing pressure
• Parbond ends are removable for welding
• High purity, made from virgin PTFE
• Compact size

UHP Single Stage, Pressure Regulator Internally Threadless
QR4000 & NPR4000 Series
The QR4000 is a high purity, high pressure non-tied diaphragm regulator. It utilizes a metal-tometal diaphram seal which provides enhanced leak integrity. 
The NPR4000 regulator is for applications involving negative delivery pressures with low pressure gas sources. Typical applications include the delivery of low pressure gases from liquid sources such as WF6, BCL3. 
[ Performance ]
* Flow Capacity
  - Cv Options : Cv 0.06 (std), Cv 0.02, Cv 0.15

*  Leak Rate : Inboard Test Method
  - Internal < 4 x 10-8 scc/sec He
  - External < 2 x 10-10 scc/sec He

* Supply Pressure Effect : Based upon Cv Option
• QR4000
     0.02 Cv : 0.23 psig/100 psig (0.16 barg/7 barg)
     0.06 Cv : 0.6 psig/100 psig (0.04 barg/7 barg)
      0.15 Cv 1.5 psig/100 psig (0.1 barg/7 barg) 

UHP Stainless Steel Diaphragm Valve High Pressure, Welded
845 / 945 Valve
945 valve was designed specifically for semiconductor process control and has all of the features and benefits of the 944 Series with reduced internal volume and body size.

A unique feature of the 945 is the machined on tube stubs, which allows for improved dimensional control.

[ Performance ]
* Design
  • Proof Pressure
      AOPHP, I, L, M, S : 5,250 psig (362 barg)
      G  : 188 psig (13 barg)
  • Burst Pressure
     AOPHP, I, L, M, S : 10,500 psig (724 barg)
     G : 375 psig (26 barg)

* Flow Capacity
   AOP, G, S, I Cv 0.25 Lever Cv 0.18

Seamless Convoluted PTFE Hose (with Nomex Braid)
Parker Polyflex PTFE Hoses
Parker PTFE hose provides full conveyance solutions for a wide array of markets and applications because of the unique properties of PTFE. 
[ Unique properties of PTFE ]

• Inert to virtually all chemicals
• Applicable from -70 °C up to +232 °C (depending on hose type)
• Minimizes pressure drop and deposits on hose inner surface, easy to clean
• Convoluted designs have excellent bend radius properties
• Low tendency to hydrolysis
• Unlimited shelf life of bulk hose
Silicon Covered PTFE Hose
(with Static-Dissipative Tube)
919BJ Static-Dissipative PTFE Hose with Silicone Cover 
Silicone protected wire reinforcement with static-dissipative core tube for  conveying non-conducting fluids. 
[ Features ]
• Static-dissipative core tube minimizes the generation of static
. • Silicone cover provides a clean, smooth cover to protect the internal hose components against wear, fraying, and contaminants
• Silicone cover provides increased safety to operators by significantly reducing the outer cover surface temperature of the hose when conveying high temperature media
• Resists moisture
• Excellent chemical compatibility 

Compact, Non-Spill Stainless Steel Quick Couplings
NSS Series
When your application involves a critical process environment where fluid loss or air inclusion can cause significant quality or safety issues, Parker’s NSS Series  non-spill couplings provide a secure connection. Constructed of corrosion resistant, media compatible materials, NSS quick couplings are designed to perform
[ Features ]
  •  Non-spill valving ensures minimal fluid loss and low air inclusion
•  Easy push to connect operation with guided alignment
•  High flow and compact size
•  Stainless steel construction
•  Seal material and end fitting options

Simple Push-pull action Instrumentation Couplings 
CPI Series
Simple push-pull action to connect and disconnect lines–no tools required

. • Reliable, leak-tight O-ring seals for vacuum or pressure systems

. • Couplers and nipples are available valved or unvalved. Valves automatically open when connected and shut off when disconnected to minimize the loss of liquids or gases.

• Positive valve stops prevent flow checking

. • Valve guide positively aligns valve with seat to prevent leakage..
[ Specifications ]
Vacuum Rating : Parker CPI Series will handle vacuums up to 50 millitorr or .05 mm of Hg absolute pressure.


파카 솔루션 영상 보기
Parker Veriflo QR4000
How to Reduce Consumable Costs in Semiconductor Fabrication Process - Sealing Solutions

파카하니핀 코리아에 직접 문의하세요.   
온라인 전시 및 일반 문의
• Email: parkerkr@parker.com    • Phone: 02-559-0400 •  Homepage: www.parker.com/ko