Precise Control of Semiconductor Process Gases
Parker Veriflo's FR Series ultra-high-purity (UHP) Single Stage Pressure Regulators maintain precise, stable, and repeatable pressure control to meet today’s demanding semiconductor gas application requirements.
FR1000/FRN1000 Series
The FR1000 and FRN1000 Series are ideal for source and distribution applications. They are
excellent choices for valve manifold boxes and gas cabinets.
FR1200/FRN1200 Series
The FR1200 and FRN1200 Series are ideal for source and distribution applications. They are
excellent choices for ultra-high purity bulk and specialty gas delivery systems.
FR1300/FRN1300 Series
The FR1300 and FRN1300 Series are ideal for distribution applications. They are excellent choices for cylinder or point-of-use bulk and specialty gas applications.
FR1400/FR1403SA Series
The FR1400 and FR1403SA Series are ideal for source and distribution applications. They are excellent choices for cylinder or point-of-use bulk specialty gas applications. A negative pressure option is available.
FR Series Product Selection Table
